Focused on micro-electronics industry Picosecond & femtosecond micro-cutting·drilling·etching·scribing system
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Automatic picosecond laser wafer scribing machin

Industry application:  

Semiconductor IC circuit, such as single or double glass passivated silicon wafer, single or double polished silicon wafer , GaAs, GaN, IC wafer.


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Name:Automatic picosecond laser wafer scribing machin    Model:STL-5030I

 

Technical specifications 

No.

Items

STL-5030I laser micro processing system technical specifications

1

Type of laser

1064nm picosecond solid-state laser

2

Maximum laser power

50W  200Khz (10p spulse width)

3

Laser minimum focusing spot

15um

4

Laser single maximum operating range

Length 300mm    line width 15um 

5

The maximum working range of laser scribing

300*300mm

6

The positioning accuracy of laser scribing

≤±3um

7

Laser streak

The maximum drawing speed is less than or equal to 800mm/s

The optimal speed of 400mm/s dicing (according to the product thickness.)


8

XY Maximum moving speed of platform

800mm/S    1G acceleration

9

Positioning accuracy of XY platform

   ≤±3um300 Mm range)

10

Repeated precision of XY platform

   ≤±1um300 mm range

11

CCD positioning accuracy

The field range less than 5 million pixel 12mm 3um supports multiple target set function

12

Whole machine power supply

45KW/AC220V/50Hz(With the ventilation system)

13

Cooling mode

Constant temperature water cooling

14

Appearance size (length X width X height)

2280mm*1550mm*1880mmNo warning light

Sample picture

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Technical specifications:

Technical specifications

STL-5030I

Type of laser

355nm 532nm 1064nm  Optional

Maximum laser power

10-100W Optional

Laser minimum focusing spot

15um

Product processing size

6-12 inch

Maximum moving speed of XY platform

800mm/s  1G acceleration

CCD positioning accuracy

≤±2um

Repeated precision of XY platform

≤±1um

Positioning accuracy of XY platform

≤±3um

Whole machine power supply

6KW/AC220V/50Hz

Cooling mode

Constant temperature water cooling

Overall size

2240mm(W)×1528mm(L)×1900mm(H)


Hits:  UpdateTime:2016-05-27 11:44:24  【Printing】  【Close